Festo VTOC Valve Terminal Can Control up to 96 Control Points in Semiconductor Fabrication
As semiconductor gas box designs incorporate more process lines and control points, the number of pilot valves required to manage critical gases increases. Typical valve terminals with limited capacity force OEMs to use multiple units, increasing panel space, wiring complexity, build time, and system cost. Festo now offers the VTOC valve terminal in a format configurable for high-density semiconductor applications. This special variant features 48 valve stations – twice the standard VTOC capacity – within a single compact footprint unit. Each valve slice controls two processes, enabling up to 96 process control points per unit. Rather than extending the terminal lengthwise to increase valve count, Festo redesigned the VTOC terminal to integrate two compact rows of valves, allowing the terminal to deliver higher control capacity while maintaining a compact form factor ideal for conserving control panel space.
